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Debris removal from high aspect structures

Invented by: Tod Evan Robinson
Boynton Beach, FL

Bernabe J. Arruza
Boca Raton, FL

Kenneth Gilbert Roessler
Boca Raton, FL

David Brinkley
Baltimore, MD

Jeffrey E. Leclaire
Boca Raton, FL Applicant: Name City State Country Type RAVE LLC Delray Beach FL US

Originally Assigned to: RAVE LLC
Delray Beach, FL Family ID: 1000004104915
[Now assigned to . . .]

Issued:2019-06-25
Filed:2016-05-20
Application No:15160302
Examined by:Markoff; Alexander

A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.

[pdf] U.S. Pat. No. 10,330,581

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