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MOPA excimer or molecular fluorine laser system with improved synchronization

Invented by: Sergei V. Govorkov
Boca Raton, FL

Andriy N. Knysh
Boca Raton, FL

Alexander O. Wiessner
Goettinge, DE

Originally Assigned to: Lambda Physik AG
Goettingen, DE
[Now assigned to . . .]

Issued:2008-04-29
Filed:2004-05-17
Application No:10847071
Examined by:Harvey; Minsun Oh

The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.

[pdf] U.S. Pat. No. 7,366,213

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